Thickness and Composition Measurements of Nanoelectronics Multilayer Thin Films by Energy Dispersive Spectroscopy (EDS)
نویسندگان
چکیده
منابع مشابه
architecture and engineering of nanoscale sculptured thin films and determination of their properties
چکیده ندارد.
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ژورنال
عنوان ژورنال: Journal of Physics: Conference Series
سال: 2013
ISSN: 1742-6596
DOI: 10.1088/1742-6596/417/1/012033